仪器型号 | 标准粒子 |
380 N3000 | 92nm,240nm |
380 Z3000 | 92nm,240nm,zeta |
780 APS | 5&10μm |
780 SIS | 0.8&2&5μm |
780 AD | 0.8&2&5μm |
780 FX | 240nm,400nm,1μm |